HDP ESC
We can refurbish all kind of Novellus HDP Speed ESC, AMAT Ultima DPS and all Test as good as the original OEM specifications
ㆍRefurbishing Service
Re-welding of ALN Plate & AL Plate, Dimples/ Embossing Regeneration,etc
ㆍAll Test Service
Uniformity Test, Chucking Test, Bonding Test, Air Leak Test, Dimples/Embossing Test, etc
| Assy # | Descripton |
|---|---|
| 02-121096-00 | 200mm Novellus Speed HDP ESC(Black Plate) |
| 02-121642-00 | 200mm Novellus Speed HDP ESC(Black Plate) |
| 02-134263-00 | 200mm Novellus Speed HDP ESC(Black Plate) |
| 05-134263-00 | 200mm Novellus Speed HDP ESC(Black Plate) |
| 02-267095-00 | 200mm Novellus Speed HDP ESC(Black Plate) |
| 15-028190-00 | 200mm Novellus Speed HDP ESC(Black Plate) |
| 15-118976-00 | 200mm Novellus Speed HDP ESC(Black Plate) |
| 15-121119-00 | 200mm Novellus Speed HDP ESC(Black Plate) |
| Assy # | Descripton |
|---|---|
| 02-264836-00 | 300mm Novellus Speed HDP ESC |
| 02-267289-00 | 300mm Novellus Speed HDP ESC |
| 02-283808-00 | 300mm Novellus Speed HDP ESC |
| 02-283811-00 | 300mm Novellus Speed HDP ESC |
| 15-265814-00 | 300mm Novellus Speed HDP ESC |
| Assy # | Descripton |
|---|---|
| 0040-18100 | 200mm AMAT Ultima HDP ESC(White Plate) |
| 0040-18208 | 200mm AMAT Ultima HDP ESC(White Plate) |
| 0040-18219 | 200mm AMAT Ultima HDP ESC(White Plate) |
| 0040-32905 | 200mm AMAT Ultima HDP ESC(White Plate) |
| 0040-54755 | 200mm AMAT Ultima HDP ESC(White Plate) |
| Assy # | Descripton |
|---|---|
| 0040-33215 | 300mm Dual HE HDPCVD ESC(Ultima X E-chuck) |
| 0040-48594 | 300mm Dual HE HDPCVD ESC(Ultima X E-chuck) |