Amat/TEL Ceramic Heater

We refurbish all kind of ALN Heater [CVD Ceramic Heater] and all Test as good as the original OEM specifications.

ㆍRefurbishing Service
    Dimples/ Embossing Regeneration, Electrode & Ground Welding, Ceramic Tube Welding, AL Cap Modify, etc
ㆍAll Test Service
    Uniformity Test, Temperature Test, Ground Test, Chucking Test, Dimples/ Embossing Test, etc

We have significant experience in the refurbishment of the following parts and assemblies from AMAT and TEL Parts 

ㆍAMAT Producer Ceramic Heater (200mm, 300mm)
ㆍ200mm DCxZ Ceramic Heater (Giga fill ALN Heater)
ㆍ200mm DxZ Ceramic Heater
ㆍ200mm TixZ Ceramic Heater (Gigafill ALN Heater)
ㆍ200mm DcSxZ Ceramic Long Shaft Heater
ㆍAMAT Dual Zone Ceramic Heater(200mm, 300mm)
ㆍ300mm TEL Trias Stage Ceramic Heater
ㆍAMAT CWXZ Ceramic Heater (200mm, 300mm)
ㆍ300mm Purge Ceramic Heater
ㆍGenus CVD 300mm AlN Heater
ㆍAPF Producer Ceramic Heater (200mm, 300mm)
ㆍetc.

Assy # Descripton
0010-03287 200mm Producer Ceramic Heater
0010-03840 200mm Producer Ceramic Heater
0010-03841 200mm Producer Ceramic Heater
0010-04978 200mm Producer Ceramic Heater
0010-08901 200mm Producer Ceramic Heater
0010-12282 200mm Producer Ceramic Heater
0010-17871 200mm Producer Ceramic Heater
0010-25323 200mm Producer Ceramic Heater
0010-25415 200mm Producer Ceramic Heater
0010-29675 200mm Producer Ceramic Heater
0010-38516 200mm Producer Ceramic Heater
0040-02539 200mm Producer Cer. Heater AL Cap#
0040-37593 200mm Producer Cer. Heater AL Cap#
0040-39947 200mm Producer Cer. Heater AL Cap#
0040-45008 200mm Producer Ceramic Heater Plate#
0040-47318 200mm Producer Ceramic Heater Plate#
0040-51612 200mm Producer Ceramic Heater
0040-61254 200mm Producer Cer. Heater AL Cap#
0040-61269 200mm Producer Ceramic Heater Plate#
0040-70479 200mm Producer Ceramic Heater Plate#
0040-86263 200mm Producer Ceramic Heater Plate#
0040-86625 200mm Producer Cer. Heater AL Cap#
0040-MF612 200mm Producer Ceramic Heater Plate#
0190-01168 TC Assy for 200mm Producer Cer. Heater
0190-03506 200mm Producer Ceramic Heater
0190-35986 TC Assy for 200mm Producer Cer. Heater
0200-200MC 200mm Producer Ceramic Heater Plate#
0200-35527 200mm Producer Ceramic Heater Plate#
0200-37359 200mm Producer Ceramic Heater
Assy # Descripton
0010-06598 300mm Producer Ceramic Heater
0010-08265 300mm Producer Ceramic Heater
0010-08605 300mm Producer Ceramic Heater
0010-11681 300mm Producer Ceramic Heater
0010-11908 300mm Producer Ceramic Heater
0010-14700 300mm Producer Ceramic Heater
0010-23014 300mm Producer Ceramic Heater
0010-23794 300mm Producer Ceramic Heater
0010-24189 300mm Producer Ceramic Heater
0010-24299 300mm Producer Ceramic Heater
0010-24300 300mm Producer Ceramic Heater
0010-24685 300mm Producer Ceramic Heater
0010-28081 300mm Producer Ceramic Heater
0010-29128 300mm Producer Ceramic Heater
0010-30838 300mm Producer Ceramic Heater
0010-31708 300mm Producer Ceramic Heater
0010-31709 300mm Producer Ceramic Heater
0010-31724 300mm Producer Ceramic Heater
0040-04048 300mm Producer Ceramic Heater
0040-07024 300mm Producer Ceramic Heater
0040-07031 300mm Producer Ceramic Heater
0040-07033 300mm Producer Ceramic Heater
0040-42270 300mm Producer Ceramic Heater
0040-44585 300mm Producer Ceramic Heater
0040-49020 300mm Producer Ceramic Heater
0040-53976 300mm Producer Ceramic Heater
0040-82041 300mm Producer Ceramic Heater
0040-82421 300mm Producer Ceramic Heater
0040-84051 300mm Producer Ceramic Heater
0040-85475 300mm Producer Ceramic Heater
0040-85725 300mm Producer Ceramic Heater
0040-89894 300mm Producer Ceramic Heater
0041-01652 300mm Producer Ceramic Heater
0190-05406 300mm Producer Ceramic Heater
0190-05083 300mm Producer Ceramic Heater Plate#
0010-31871 300mm Producer Ceramic Heater
0010-04461 300mm Producer Ceramic Heater
0010-07042 300mm Producer Ceramic Heater
Assy # Descripton
0010-36631 200mm DcSxZ Ceramic Long Shaft Heater
0040-02149 200mm DcSxZ Ceramic Long Shaft Heater Plate#
0040-32712 200mm DcSxZ Ceramic Long Shaft Heater Plate#
0190-35615 TC Assy for 200mm DcSxZ Ceramic Long Shaft Heater