Amat/TEL Ceramin Heater
| Assy # | Descripton |
|---|---|
| 0010-03287 | 200mm Producer Ceramic Heater |
| 0010-03840 | 200mm Producer Ceramic Heater |
| 0010-03841 | 200mm Producer Ceramic Heater |
| 0010-04978 | 200mm Producer Ceramic Heater |
| 0010-08901 | 200mm Producer Ceramic Heater |
| 0010-12282 | 200mm Producer Ceramic Heater |
| 0010-17871 | 200mm Producer Ceramic Heater |
| 0190-21443 | 200mm Producer Ceramic Heater |
| 0010-25323 | 200mm Producer Ceramic Heater |
| 0010-25415 | 200mm Producer Ceramic Heater |
| 0010-29675 | 200mm Producer Ceramic Heater |
| 0010-38516 | 200mm Producer Ceramic Heater |
| 0040-02539 | 200mm Producer Cer. Heater AL Cap# |
| 0040-37593 | 200mm Producer Cer. Heater AL Cap# |
| 0040-39947 | 200mm Producer Cer. Heater AL Cap# |
| 0040-45008 | 200mm Producer Ceramic Heater Plate# |
| 0040-47318 | 200mm Producer Ceramic Heater Plate# |
| 0040-51612 | 200mm Producer Ceramic Heater |
| 0040-61254 | 200mm Producer Cer. Heater AL Cap# |
| 0040-61269 | 200mm Producer Ceramic Heater Plate# |
| 0040-70479 | 200mm Producer Ceramic Heater Plate# |
| 0040-86263 | 200mm Producer Ceramic Heater Plate# |
| 0040-86625 | 200mm Producer Cer. Heater AL Cap# |
| 0040-MF612 | 200mm Producer Ceramic Heater Plate# |
| 0190-01168 | TC Assy for 200mm Producer Cer. Heater |
| 0190-03506 | 200mm Producer Ceramic Heater |
| 0190-35986 | TC Assy for 200mm Producer Cer. Heater |
| 0200-200MC | 200mm Producer Ceramic Heater Plate# |
| 0200-35527 | 200mm Producer Ceramic Heater Plate# |
| 0200-37359 | 200mm Producer Ceramic Heater |
| Assy # | Descripton |
|---|---|
| 0010-01166 | 200mmm MCA E-Chuck Heater |
| 0010-01196 | 200mmm MCA E-Chuck Heater |
| 0010-01286 | 200mmm MCA E-Chuck Heater |
| 0010-01288 | 200mmm MCA E-Chuck Heater |
| 0010-01625 | 200mmm MCA E-Chuck Heater |
| 0010-01925 | 200mmm MCA E-Chuck Heater |
| 0010-01926 | 200mmm MCA E-Chuck Heater |
| 0010-03028 | 200mmm MCA E-Chuck Heater |
| 0010-03030 | 200mmm MCA E-Chuck Heater |
| 0010-03254 | 200mmm MCA E-Chuck Heater |
| 0010-03361 | 200mmm MCA E-Chuck Heater |
| 0010-04450 | 200mmm MCA E-Chuck Heater |
| 0010-04452 | 200mmm MCA E-Chuck Heater |
| 0010-06205 | 200mmm MCA E-Chuck Heater |
| 0010-08750 | 200mmm MCA E-Chuck Heater |
| 0010-12516 | 200mmm MCA E-Chuck Heater |
| 0010-13313 | 200mmm MCA E-Chuck Heater |
| 0010-13314 | 200mmm MCA E-Chuck Heater |
| 0010-13895 | 200mmm MCA E-Chuck Heater |
| 0010-15961 | 200mmm MCA E-Chuck Heater |
| 0010-21836 | 200mmm MCA E-Chuck Heater |
| 0010-21839 | 200mmm MCA E-Chuck Heater |
| 0010-21840 | 200mmm MCA E-Chuck Heater |
| 0010-21946 | 200mmm MCA E-Chuck Heater |
| 0010-22166 | 200mmm MCA E-Chuck Heater |
| 0010-22167 | 200mmm MCA E-Chuck Heater |
| 0010-22180 | 200mmm MCA E-Chuck Heater |
| 0010-22186 | 200mmm MCA E-Chuck Heater |
| 0010-22408 | 200mmm MCA E-Chuck Heater |
| 0010-22411 | 200mmm MCA E-Chuck Heater |
| 0010-SLTCE | 200mmm MCA E-Chuck Heater |
| 0020-23478 | 200mmm MCA E-Chuck Heater |
| 0020-25478 | 200mmm MCA E-Chuck Heater Shaft# |
| 0040-05790 | 200mmm MCA E-Chuck Heater Cover Plate# |
| 0040-13150 | 200mmm MCA E-Chuck Heater Cover Plate# |
| 0190-00381 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-00382 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-13257 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-21442 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-21443 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-21581 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-21597 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-21758 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-21759 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-21764 | 200mmm MCA E-Chuck Heater Puck # |
| 0190-22094 | 200mmm MCA E-Chuck Heater Puck # |
| Assy # | Descripton |
|---|---|
| 0010-03774 | 300mmm MCA E-Chuck Heater |
| 0010-07815 | 300mmm MCA E-Chuck Heater |
| 0010-11343 | 300mmm MCA E-Chuck Heater |
| 0010-14204 | 300mmm MCA E-Chuck Heater |
| 0010-16109 | 300mmm MCA E-Chuck Heater |
| 0010-16858 | 300mmm MCA E-Chuck Heater |
| 0010-17111 | 300mmm MCA E-Chuck Heater |
| 0010-22134 | 300mmm MCA E-Chuck Heater |
| 0010-22183 | 300mmm MCA E-Chuck Heater |
| 0010-22184 | 300mmm MCA E-Chuck Heater |
| 0010-22985 | 300mmm MCA E-Chuck Heater |
| 0010-23066 | 300mmm MCA E-Chuck Heater |
| 0010-23068 | 300mmm MCA E-Chuck Heater |
| 0010-23677 | 300mmm MCA E-Chuck Heater |
| 0010-23803 | 300mmm MCA E-Chuck Heater |
| 0010-24076 | 300mmm MCA E-Chuck Heater |
| 0010-24358 | 300mmm MCA E-Chuck Heater |
| 0010-24456 | 300mmm MCA E-Chuck Heater |
| 0010-27430 | 300mmm MCA E-Chuck Heater |
| 0010-27431 | 300mmm MCA E-Chuck Heater |
| 0020-08825 | 300mmm MCA E-Chuck Heater |
| 0040-23068 | 300mmm MCA E-Chuck Heater Cover Plate# |
| 0040-23680 | 300mmm MCA E-Chuck Heater Cover Plate# |
| 0040-70754 | 300mmm MCA E-Chuck Heater Cover Plate# |
| HTB2-009 | 300mmm MCA E-Chuck Heater |
| HTB2-035 | 300mmm MCA E-Chuck Heater |